The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Apr. 30, 2010
Levinus Pieter Bakker, Helmond, NL;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Johannes Maria Freriks, Veldhoven, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
Levinus Pieter Bakker, Helmond, NL;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Johannes Maria Freriks, Veldhoven, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation system includes a contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris coming from the radiation source. The contamination barrier includes a plurality of lamellas. The surface of the lamellas includes a material. The radiation system also includes a collector configured to collect radiation from the contamination barrier. An optical surface of the collector includes a material that is the same as the material of the surface of the lamellas.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile