The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Nov. 24, 2009
Nobuhiro Okai, Kokubunji, JP;
Yasunari Sohda, Kawasaki, JP;
Nobuhiro Okai, Kokubunji, JP;
Yasunari Sohda, Kawasaki, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is a scanning electron microscope including: an image recording unit () which stores a plurality of acquired frame images; a correction analyzing handling unit () which calculates a drift amount between frame images and a drift amount between a plurality of field images constituting a frame image; and a data handling unit () which corrects positions of respective field images constituting the plurality of fields images according to the drift amount between the field images and superimposes the field images on one another so as to create a new frame image. This provides a scanning electron microscope which can obtain a clear frame image even if an image drift is caused during observation of a pattern on a semiconductor substrate or an insulating object.