The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Oct. 07, 2009
Terence L. Kane, Hopewell Junction, NY (US);
Michael P. Tenney, Hopewell Junction, NY (US);
Yun-yu Wang, Hopewell Junction, NY (US);
Keith Kwong Hon Wong, Hopewell Junction, NY (US);
Terence L. Kane, Hopewell Junction, NY (US);
Michael P. Tenney, Hopewell Junction, NY (US);
Yun-Yu Wang, Hopewell Junction, NY (US);
Keith Kwong Hon Wong, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An antifuse structure and methods of forming contacts within the antifuse structure. The antifuse structure includes a substrate having an overlying metal layer, a dielectric layer formed on an upper surface of the metal layer, and a contact formed of contact material within a contact via etched through the dielectric layer into the metal layer. The contact via includes a metal material at a bottom surface of the contact via and an untreated or partially treated metal precursor on top of the metal material.