The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Jan. 29, 2009
Jung-youl Lee, Anyang-Si, KR;
Jeong-sik Kim, Hwaseon-Si, KR;
Eu-jean Jang, Hwaseong-Si, KR;
Jae-woo Lee, Bucheon-Si, KR;
Jae-hyun Kim, Seoul, KR;
Jung-Youl Lee, Anyang-Si, KR;
Jeong-Sik Kim, Hwaseon-Si, KR;
Eu-Jean Jang, Hwaseong-Si, KR;
Jae-Woo Lee, Bucheon-Si, KR;
Jae-Hyun Kim, Seoul, KR;
Dongjin Semichem Co., Ltd., Incheon, KR;
Abstract
Disclosed are a photosensitive compound containing oxime group which is directly decomposed by exposure to light, which is a molecular resist whose size is smaller than conventional polymer for photoresist, and a photoresist composition including the same. The photosensitive molecular compound has a structure represented by a following formula. In Formula, Ris hydrogen atom or methyl group (CH); Rand Reach is independently alkyl group of 1-6 carbon atoms, alkylcarbonyl group of 2-7 carbon atoms, aryl group of 6-10 carbon atoms or arylcarbonyl group of 7-11 carbon atoms, and Rand Rform one group as an united body, alkyl or cycloalkyl group of 1-20 carbon atoms or arylalkyl group of 7-20 carbon atoms which are doubly bonded to nitrogen atom.