The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Aug. 13, 2009
Paul A. Zimmerman, Cedar Creek, TX (US);
Aristeidis Bakandritsos, Rio Patras, GR;
Michael F. Zettel, Ithaca, NY (US);
Markos Trikeriotis, Ithaca, NY (US);
Robert Rodriguez, Ithaca, NY (US);
Emmanuel P. Giannelis, Ithaca, NY (US);
Woo Jin Bae, Ithaca, NY (US);
Christopher K. Ober, Ithaca, NY (US);
Paul A. Zimmerman, Cedar Creek, TX (US);
Aristeidis Bakandritsos, Rio Patras, GR;
Michael F. Zettel, Ithaca, NY (US);
Markos Trikeriotis, Ithaca, NY (US);
Robert Rodriguez, Ithaca, NY (US);
Emmanuel P. Giannelis, Ithaca, NY (US);
Woo Jin Bae, Ithaca, NY (US);
Christopher K. Ober, Ithaca, NY (US);
Intel Corporation, Austin, TX (US);
Cornell University, Ithaca, NY (US);
Abstract
The present invention relates generally to non-aggregating nanoparticles, including ligand capped metal oxide nanoparticles. Methods for their synthesis and methods for their use, for example, for improved immersion lithography processes, are also disclosed.