The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Apr. 11, 2011
John Esbenshade, Clayton, DE (US);
Andrew M Geiger, Newark, DE (US);
Paul Libbers, Claymont, DE (US);
Samuel J November, Newtown, PA (US);
Paul J Sacchetti, Warrington, PA (US);
Jonathan Tracy, Kennett Square, PA (US);
David Verbaro, Cinnaminson, NJ (US);
Michael E Watkins, Bear, DE (US);
John Esbenshade, Clayton, DE (US);
Andrew M Geiger, Newark, DE (US);
Paul Libbers, Claymont, DE (US);
Samuel J November, Newtown, PA (US);
Paul J Sacchetti, Warrington, PA (US);
Jonathan Tracy, Kennett Square, PA (US);
David Verbaro, Cinnaminson, NJ (US);
Michael E Watkins, Bear, DE (US);
Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US);
Abstract
A mix head assembly for use in the manufacture of chemical mechanical polishing pad polishing layers is provided, wherein inclusions of entrained gas inclusion defects are minimized.