The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Apr. 20, 2006
Nobuyuki Takahashi, Tokyo, JP;
Tadakazu Sone, Tokyo, JP;
Takuji Kobayashi, Tokyo, JP;
Hiroomi Torii, Tokyo, JP;
Nobuyuki Takahashi, Tokyo, JP;
Tadakazu Sone, Tokyo, JP;
Takuji Kobayashi, Tokyo, JP;
Hiroomi Torii, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A wafer transferring apparatus includes a top ring for holding a wafer on a lower end surface thereof and a pusher mechanism for transferring the wafer to and from the top ring. The pusher mechanism has a wafer rest for placing the wafer thereon and is arranged to allow the wafer released from the lower end surface of the top ring to be seated on the wafer rest. The pusher mechanism also has a sensor mechanism for detecting when the wafer is properly seated on the wafer rest. The sensor mechanism is adapted to block sensor light emitted from a light-emitting device by the wafer seated on the wafer rest.