The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Jun. 30, 2009
Lawrence D. Rotter, Pleasanton, CA (US);
David Y. Wang, Santa Clara, CA (US);
Derrick Shaughnessy, San Jose, CA (US);
Mark Senko, Santa Cruz, CA (US);
Lawrence D. Rotter, Pleasanton, CA (US);
David Y. Wang, Santa Clara, CA (US);
Derrick Shaughnessy, San Jose, CA (US);
Mark Senko, Santa Cruz, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.