The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Mar. 05, 2004
Toshihisa Nozawa, Amagasaki, JP;
Koji Kotani, Amagasaki, JP;
Toshihisa Nozawa, Amagasaki, JP;
Koji Kotani, Amagasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A first flow passage (), which cools a temperature controlled object by a circulating first cooling water (), and a second flow passage () separate from the first flow passage are provided so as to exchange heat between a second cooling water () flowing through the second flow passage () and the first cooling water (). There is no need to store the first cooling water () in a tank of a constant capacity, and the first cooling water () flowing through the first flow passage () of a chiller corresponding part is absorbed substantially in its entirety by the second cooling water (). A response becomes quick with respect to a load fluctuation of the temperature controlled object, and waste of energy can be reduced while improving accuracy of temperature control.