The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Oct. 07, 2005
Masakazu Hayashi, Ebina, JP;
Shinji Nakata, Yokohama, JP;
Susumu Yahagi, Yokohama, JP;
Shibaura Mechatronics Corporation, Yokohama-shi, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
The brittle workpiece splitting systemincludes a substrate holding mechanismfor holding a substrate, and a processing unitfor splitting the substrateheld by the substrate holding mechanismby a splitting process. The substrate holding mechanismhas an edge damperadapted to clamp an edge part of the substratefrom the sides of the opposite surfaces of the edge part, and support membersfor supporting the substratethereon at a predetermined height. The support membersare disposed on the side opposite the side of the edge damperwith respect to the intended split lineparallel to the edge part of the substrate. The edge damperhas an edge holderon which the substrateis seated, and a pressure barfor pressing the substrateagainst the edge holderto hold the substratebetween the edge holderand the pressure bar. Resin membersandmade of an elastic material having comparatively high rigidity are attached to parts, to be brought into contact with the substrate, of the pressure barand the edge holder, respectively. The support membersare made of a low-friction material to permit the horizontal movement of the substrateduring the splitting process.