The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2012

Filed:

Sep. 29, 2009
Applicants:

Hyeong Chan JO, Suwon, KR;

Hong Jae Lim, Suwon, KR;

Seung Jun Shin, Seoul, KR;

Joon Hui Kim, Seoul, KR;

Yong Seok Kim, Seoul, KR;

Sang-il Park, Seongnam, KR;

Inventors:

Hyeong Chan Jo, Suwon, KR;

Hong Jae Lim, Suwon, KR;

Seung Jun Shin, Seoul, KR;

Joon Hui Kim, Seoul, KR;

Yong Seok Kim, Seoul, KR;

Sang-il Park, Seongnam, KR;

Assignee:

Park Systems Corp., Suwon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.


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