The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Aug. 03, 2010
Bang-chiang Lan, Taipei, TW;
Ming-i Wang, Taipei County, TW;
Li-hsun Ho, Hsinchu County, TW;
Hui-min Wu, Changhua County, TW;
Min Chen, Taipei County, TW;
Chien-hsin Huang, Taichung, TW;
Tzung-i Su, Yunlin County, TW;
Bang-Chiang Lan, Taipei, TW;
Ming-I Wang, Taipei County, TW;
Li-Hsun Ho, Hsinchu County, TW;
Hui-Min Wu, Changhua County, TW;
Min Chen, Taipei County, TW;
Chien-Hsin Huang, Taichung, TW;
Tzung-I Su, Yunlin County, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A method for fabricating a MEMS is described as follows. A substrate is provided, including a circuit region and a MEMS region separated from each other. A first metal interconnection structure is formed on the substrate in the circuit region, and simultaneously a first dielectric structure is formed on the substrate in the MEMS region. A second metal interconnection structure is formed on the first metal interconnection structure, and simultaneously a second dielectric structure, at least two metal layers and at least one protection ring are formed on the first dielectric structure. The metal layers and the protection ring are formed in the second dielectric structure and the protection ring connects two adjacent metal layers to define an enclosed space between two adjacent metal layers. The first dielectric structure and the second dielectric structure outside the enclosed space are removed to form a MEMS device in the MEMS region.