The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Oct. 27, 2008
Yi Xiang Wang, Fremont, CA (US);
Juying Dou, San Jose, CA (US);
Kenichi Kanai, Palo Alto, CA (US);
Jun Jiang, Fremont, CA (US);
Zheng Fan, Beijing, CN;
Qingyu Meng, Beijing, CN;
Jay Chen, Fremont, CA (US);
Yi Xiang Wang, Fremont, CA (US);
Juying Dou, San Jose, CA (US);
Kenichi Kanai, Palo Alto, CA (US);
Jun Jiang, Fremont, CA (US);
Zheng Fan, Beijing, CN;
Qingyu Meng, Beijing, CN;
Jay Chen, Fremont, CA (US);
Hermes-Microvision, Inc., Hsinchu, TW;
Abstract
An apparatus for increasing electric conductivity to a wafer substrate, when exposed to electron beam irradiation, is disclosed. More specifically, a methodology to breakdown the insulating layer on wafer backside is provided to significantly reduce the damage on the wafer backside while proceeding with the grounding process.