The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Oct. 07, 2008
Jui-fang Chen, Taichung County, TW;
Cheng-hung Chang, Hsinchu, TW;
Chung-jung Chen, Hsinchu, TW;
Chien-kuo Ko, Hsinchu, TW;
Chi-chun Yao, Tainan, TW;
Jui-Fang Chen, Taichung County, TW;
Cheng-Hung Chang, Hsinchu, TW;
Chung-Jung Chen, Hsinchu, TW;
Chien-Kuo Ko, Hsinchu, TW;
Chi-Chun Yao, Tainan, TW;
United Microelectronics Corp., Science-Based Industrial Park, Hsinchu, TW;
Abstract
The invention provides an ion current measurement device for a tool having an ion source. The ion current measurement device comprises an ion collecting cup and a replaceable liner. The ion collecting cup is disposed in the tool and the ion collecting cup possesses a cup opening facing the ion source. The replaceable liner is disposed in the ion collecting cup and the replaceable liner entirely covers a continuous inner sidewall of the ion collecting cup.