The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Feb. 28, 2008
Yutaka Kouzuma, Kudamatsu, JP;
Yutaka Ohmoto, Hikari, JP;
Mamoru Yakushiji, Shunan, JP;
Ken Yoshioka, Hikari, JP;
Tsunehiko Tsubone, Hikari, JP;
Yutaka Kouzuma, Kudamatsu, JP;
Yutaka Ohmoto, Hikari, JP;
Mamoru Yakushiji, Shunan, JP;
Ken Yoshioka, Hikari, JP;
Tsunehiko Tsubone, Hikari, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A manufacturing method includes steps of: placing a film composed of dielectric, on the top surface of a sample stage, forming a film-like heater on the film made of the dielectric, supplying power to the heater to detect a temperature distribution, adjusting a resistance value of the heater on the basis of a result of detection of a temperature distribution so that the temperature distribution has a predetermined value, and then forming the film composed of the dielectric, on the heater.