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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8085052 B1

PDFFull Text
Date of Patent:
Dec. 27, 2011

Filed:

Jul. 23, 2010

Charge eliminating apparatus and method, and program storage medium for removing static electricity from a target object such as a wafer

Applicants:

Eiichi Shinohara, Nirasaki, JP;

Kazuki Hanawa, Nirasaki, JP;

Inventors:

Eiichi Shinohara, Nirasaki, JP;

Kazuki Hanawa, Nirasaki, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Vinh Nguyen

Int. Cl.
CPC ...
G01N 27/60 (2006.01); G01R 31/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A charge eliminating apparatus eliminates, when an electrical characteristics test of a target object is performed by moving a mounting table mounting the target object thereon and a probe card relative to each other to bring the target object into electrical contact with the probe card, static electricity of the target object via the mounting table. The charge eliminating apparatus includes a grounding wiring for grounding the mounting table; a relay switch disposed on the grounding wiring; and a switch controller that controls the relay switch to be opened or closed.

Find Patent Forward Citations

Shinohara, Eiichi. (2011). Charge eliminating apparatus and method, and program storage medium for removing static electricity from a target object such as a wafer (U.S. Patent No. 8085052). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8085052

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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