Method and system for diagnosing abnormal plasma discharge

Abstract

Provided are a data obtaining section () that obtains a time-series data fluctuating in accordance with the plasma conditions, a translation error calculation section () that calculates a determinism providing an indicator of whether the time-series data in the plasma are deterministic or stochastic, from the time-series data that have been obtained in the data obtaining unit (), and an abnormal discharge determination section () that determines that the plasma is under the abnormal discharge conditions, in the case that the value representing the determinism calculated in the determinism derivation unit is less than or equal to a given threshold value, during the plasma generation. Examples of the value representing the determinism include translation error or permutation entropy. In the case the permutation entropy is used as a value representing the determinism, a permutation entropy calculation section is provided.