The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2011
Filed:
Sep. 13, 2010
Shinichi Hayashi, Koshi-Machi, JP;
Tetsuo Fukuoka, Koshi-Machi, JP;
Tetsuya Oda, Koshi-Machi, JP;
Hiroaki Inadomi, Koshi-Machi, JP;
Shinichi Hayashi, Koshi-Machi, JP;
Tetsuo Fukuoka, Koshi-Machi, JP;
Tetsuya Oda, Koshi-Machi, JP;
Hiroaki Inadomi, Koshi-Machi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate heating apparatus includes a top plate arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate. The top plate has an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface of the top plate facing the hot plate to a second surface of the top plate opposite to the first surface. When heating the substrate, a gas flow flowing through the space between the hot plate and the top plate is generated.