The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Jul. 30, 2010
Michael Teich, Moritzburg OT Friedewald, DE;
Ulf Hackius, Dresden, DE;
Juliane Busch, Dresden, DE;
Joerg Kiesewetter, Thiendorf OT Sacka, DE;
Axel Becker, Dresden, DE;
Michael Teich, Moritzburg OT Friedewald, DE;
Ulf Hackius, Dresden, DE;
Juliane Busch, Dresden, DE;
Joerg Kiesewetter, Thiendorf OT Sacka, DE;
Axel Becker, Dresden, DE;
Cascade Microtech, Inc., Beaverton, OR (US);
Abstract
A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.