The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Jun. 04, 2009
Raymond Wagner, Gorinchem, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Peter Christiaan Tiemeijer, Eindhoven, NL;
Raymond Wagner, Gorinchem, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Peter Christiaan Tiemeijer, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure () and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.