The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Oct. 17, 2008
Daniel J. Hoffman, Saratoga, CA (US);
Ying Rui, Santa Clara, CA (US);
Karl M. Brown, Mountain View, CA (US);
John Pipitone, Livermore, CA (US);
Lara Hawrylchak, Santa Clara, CA (US);
Daniel J. Hoffman, Saratoga, CA (US);
Ying Rui, Santa Clara, CA (US);
Karl M. Brown, Mountain View, CA (US);
John Pipitone, Livermore, CA (US);
Lara Hawrylchak, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a PVD reactor having a sputter target at the ceiling, a conductive housing enclosing the rotating magnet assembly has a central port for the rotating magnet axle. A conductive hollow cylinder of the housing surrounds an external portion of the spindle. RF power is coupled to a radial RF connection rod extending radially from the hollow cylinder. DC power is coupled to another radial DC connection rod extending radially from the hollow cylinder.