The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Jun. 25, 2007
Applicants:
Chi-piao Cheng, Taipei County, TW;
Li-chun Liang, Taipei, TW;
Yu-jen Huang, Chia-I, TW;
Been Chen, Hsinchu County, TW;
Sheng-yih Ting, Hsinchu County, TW;
Inventors:
Chi-Piao Cheng, Taipei County, TW;
Li-Chun Liang, Taipei, TW;
Yu-Jen Huang, Chia-I, TW;
Been Chen, Hsinchu County, TW;
Sheng-Yih Ting, Hsinchu County, TW;
Assignee:
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25B 9/00 (2006.01); C25B 11/00 (2006.01); C25B 13/00 (2006.01); C23C 14/00 (2006.01); C23C 16/00 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wafer supporting device of a sputter apparatus includes a pedestal positioned in a sputtering chamber and used to load a wafer for sputtering, a deposition ring having a recess positioned on a peripheral portion of the pedestal, and a cover ring positioned on the pedestal and the deposition ring. The cover ring has a gate corresponding to the recess.