The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
Oct. 02, 2007
Tamami Takahashi, Tokyo, JP;
Kenya Ito, Tokyo, JP;
Masaya Seki, Tokyo, JP;
Hiroaki Kusa, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides a polishing apparatus and a polishing method capable of calculating outside diameters of rolls of a polishing tape on a polishing-tape supply reel and a polishing-tape recovery reel and capable of calculating a remaining amount of the polishing tape and a consumption of the polishing tape from the outside diameters of the rolls. This polishing apparatus includes a polishing-tape supply reel (), a polishing head (), a polishing-tape drawing-out mechanism G, and a polishing-tape supply and recovery mechanism () configured to recover the polishing tape () from the polishing-tape supply reel () via the polishing head (). The polishing-tape supply and recovery mechanism () includes a motor Mb adapted to apply a torque to the polishing-tape supply reel () so as to exert a predetermined tension on the polishing tape () traveling through the polishing head (), and a rotation angle detector REa adapted to detect a rotation angle of the polishing-tape supply reel ().