The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Jan. 08, 2009
Tomofumi Nishiura, Kawasaki, JP;
Atsushi Miyamoto, Yokohama, JP;
Chie Shishido, Kawasaki, JP;
Takumichi Sutani, Hitachinaka, JP;
Tomofumi Nishiura, Kawasaki, JP;
Atsushi Miyamoto, Yokohama, JP;
Chie Shishido, Kawasaki, JP;
Takumichi Sutani, Hitachinaka, JP;
Hitachi High-Technologies Corporaiton, Tokyo, JP;
Abstract
In the inspection apparatus for a defect of a semiconductor and the method using it for automatically detecting the defect on a semiconductor wafer and presuming the defect occurrence factor using the circuit design data, a plurality of shapes are formed from the circuit design data by deforming the design data with respect to shape deformation items stipulated for respective defect occurrence factor for comparison with the inspection object circuit pattern. The defect is detected by comparison of the group of shapes formed and the actual pattern. Further, the occurrence factors of these defects are presumed, and the defects are classified according to respective factor.