The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Mar. 13, 2006
Applicants:
Sean Michael Kane, Lyndhurst, OH (US);
Steven A. Lippy, Wind Gap, PA (US);
Inventors:
Sean Michael Kane, Lyndhurst, OH (US);
Steven A. Lippy, Wind Gap, PA (US);
Assignee:
Avantor Performance Materials, Inc., Phillipsburg, NJ (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
A front end of the line (FEOL) stripping and cleaning composition for cleaning unashed ion-implanted photoresist from a wafer substrate comprises: a) at least one organic stripping solvent, b) fluoride ions from at least one of ammonium fluoride, ammonium bifluoride or hydrogen fluoride, c) at least one acidifying agent selected from inorganic or organic acids, and d) water, with an oxidizing agent optionally also being present in the composition.