The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Jun. 15, 2005
John M. DE Larios, Palo Alto, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Jeffrey Farber, Delmar, NY (US);
Mikhail Korolik, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
John M. de Larios, Palo Alto, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Jeffrey Farber, Delmar, NY (US);
Mikhail Korolik, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for cleaning a substrate is provided. In this method, a flow of non-Newtonian fluid is provided where at least a portion of the flow exhibits plug flow. To remove particles from a surface of the substrate, the surface of the substrate is placed in contact with the portion of the flow that exhibits plug flow such that the portion of the flow exhibiting plug flow moves over the surface of the substrate. Additional methods and apparatuses for cleaning a substrate also are described.