The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Jun. 07, 2007
Ashok Kulkarni, San Jose, CA (US);
Brian Duffy, San Jose, CA (US);
Kais Maayah, Cupertino, CA (US);
Gordon Rouse, Dublin, CA (US);
Eugene Shifrin, Sunnyville, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Brian Duffy, San Jose, CA (US);
Kais Maayah, Cupertino, CA (US);
Gordon Rouse, Dublin, CA (US);
Eugene Shifrin, Sunnyville, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.