The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Jan. 25, 2010
Takeshi Sunaoshi, Hitachinaka, JP;
Kouichi Kurosawa, Hitachi, JP;
Takeshi Sato, Hitachinaka, JP;
Masaaki Komori, Hitachinaka, JP;
Takeshi Sunaoshi, Hitachinaka, JP;
Kouichi Kurosawa, Hitachi, JP;
Takeshi Sato, Hitachinaka, JP;
Masaaki Komori, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There are provided an inspection apparatus and method that can locally perform sample temperature regulation, so that the sample drift can be suppressed. There are included a sample stagethat holds a semiconductor sample, multiple probesused to measure electrical characteristics of a semiconductor device on the semiconductor sample, a power source that applies voltage and/or current to the probe, a detector that measures electrical characteristics of the semiconductor device on the sample with which the probe is brought into contact, and an electromagnetic wave irradiating mechanism that irradiates electromagnetic wave on a measurement section of the semiconductor sample