The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Nov. 21, 2007
Huirong Yao, Plainsboro, NJ (US);
Zhong Xiang, Orlando, FL (US);
Jian Yin, Bridgewater, NJ (US);
Weihong Liu, Bridgewater, NJ (US);
Huirong Yao, Plainsboro, NJ (US);
Zhong Xiang, Orlando, FL (US);
Jian Yin, Bridgewater, NJ (US);
Weihong Liu, Bridgewater, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The present invention relates to an antireflective composition comprising a polymer, a thermal acid generator and optionally a crosslinking agent, where the polymer comprises at least one hydrophobic unit (1), at least one chromophore unit (2), at least one unit with a crosslinking site (3) and optionally a unit capable of crosslinking the polymer, where, Rto Rare independently selected from hydrogen and C-Calkyl, Wis a fully or partially fluorinated alkylene group, X is selected from F, H and OH; Wcomprises a chromophore group, and WY comprises a crosslinking site. The invention also relates to a process for using the antireflective coating composition.