The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Dec. 27, 2007
Applicants:
Rick Endo, San Carlos, CA (US);
Kurt Weiner, San Jose, CA (US);
Indranil DE, Mountain View, CA (US);
James Tsung, Milpitas, CA (US);
Maosheng Zhao, San Jose, CA (US);
Inventors:
Rick Endo, San Carlos, CA (US);
Kurt Weiner, San Jose, CA (US);
Indranil De, Mountain View, CA (US);
James Tsung, Milpitas, CA (US);
Maosheng Zhao, San Jose, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.