The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Mar. 09, 2005
Itaru Kanno, Chiyoda-ku, JP;
Yusaku Hirota, Chiyoda-ku, JP;
Kenji Sekiguchi, Nirasaki, JP;
Hiroshi Nagayasu, Tosu, JP;
Shouichi Shimose, Hikami-gun, JP;
Itaru Kanno, Chiyoda-ku, JP;
Yusaku Hirota, Chiyoda-ku, JP;
Kenji Sekiguchi, Nirasaki, JP;
Hiroshi Nagayasu, Tosu, JP;
Shouichi Shimose, Hikami-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An object of the present is to uniform particle diameters and speeds of liquid droplets in a two-fluid nozzle for cleaning substrates which mixes gas and liquid internally and injects liquid droplets with gas so as to clean a substrate. The two-fluid nozzle for cleaning substrates has a gas supply passage for supplying gas, a liquid supply passage for supplying liquid, and a lead-out passage for leading out internally-formed liquid droplets, wherein an injection port for injecting liquid droplets to the outside is formed at the front end of the lead-out passage, and wherein a cross-sectional area Sb of the injection port is formed smaller than a cross-sectional area Sa of the lead-out passage, and a cross sectional area Sc of an exit of the gas supply passage is formed smaller than the cross-sectional area Sa of the lead-out passage.