The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Jul. 15, 2010
Liang-chia Chen, Taipei County, TW;
Chung-chu Chang, Taipei, TW;
Yao-ting Huang, Taipei, TW;
Jin-liang Chen, Hsinchu, TW;
Liang-Chia Chen, Taipei County, TW;
Chung-Chu Chang, Taipei, TW;
Yao-Ting Huang, Taipei, TW;
Jin-Liang Chen, Hsinchu, TW;
Industrial Technology Research Insitute, Hsinchu, TW;
Abstract
A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.