The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Oct. 16, 2009
Yuichiro Yamazaki, Tokyo, JP;
Ichirota Nagahama, Tokyo, JP;
Yuichiro Yamazaki, Tokyo, JP;
Ichirota Nagahama, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gunare irradiated onto a samplethrough a primary electro-optical system, and electrons consequently emitted from the sample are detected by a detectorthrough a secondary electro-optical system. A Wien filtercomprising a multi-pole lens for correcting axial chromatic aberration is disposed between a magnification lensin the secondary electro-optical system and a beam separatorfor separating a primary electron beam and a secondary electron beam, for correcting axial chromatic aberration caused by an objective lenswhich comprises an electromagnetic lens having a magnetic gap defined on a sample side.