The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Feb. 15, 2008
Steven R. Codding, Underhill Center, VT (US);
David Domina, Cambridge, VT (US);
James L. Hardy, Jr., Essex Junction, VT (US);
Timothy C. Krywanczyk, Essex Junction, VT (US);
Steven R. Codding, Underhill Center, VT (US);
David Domina, Cambridge, VT (US);
James L. Hardy, Jr., Essex Junction, VT (US);
Timothy C. Krywanczyk, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Disclosed are embodiments of a method of removing patterned circuit structures from the surface of a semiconductor wafer. The method embodiments comprise blasting the surface of the semiconductor wafer with particles so as to remove substantially all of the patterned circuit structures. The blasting process is followed by one or more grinding, polishing and/or cleaning processes to remove any remaining circuit structures, to remove any lattice damage and/or to achieve a desired smoothness across the surface of the semiconductor wafer.