The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Feb. 27, 2009
Hiroshi Yamada, Nirasaki, JP;
Tetsuji Watanabe, Nirasaki, JP;
Takeshi Kawaji, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An inclination adjusting method adjusts an inclination of a probe card installed at a probe apparatus to make the probe card be in parallel with a mounting surface of a movable mounting table for mounting thereon an object to be inspected. The method includes: detecting an average tip height of multiple probes disposed at each of plural locations of the probe card by using a tip position detecting device; obtaining an inclination of the probe card with respect to the mounting table based on differences in the average tip heights detected from the plural locations of the probe card; and adjusting the inclination of the probe card based on the obtained inclination.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile