The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Feb. 01, 2007
Muneyuki Fukuda, Kokubunji, JP;
Tomoyasu Shojo, Hachioji, JP;
Atsuko Fukada, Kokubunji, JP;
Noritsugu Takahashi, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Tomoyasu Shojo, Hachioji, JP;
Atsuko Fukada, Kokubunji, JP;
Noritsugu Takahashi, Kokubunji, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes settings for controlling charged particle columns which irradiate charged particles on samples with a plurality of characteristics. Plural inspection recipes are arranged and displayed on a coordinate system which is specified by a plurality of axes having characteristic values (robustness variable of charge up, throughput of defect inspection, and accuracy of defect inspection) which have mutually trade-off relationships.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile