The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Jun. 29, 2009
Chun-ming Wang, Fremont, CA (US);
Chenche Huang, Campbell, CA (US);
Masaaki Higashitani, Cupertino, CA (US);
Chun-Ming Wang, Fremont, CA (US);
Chenche Huang, Campbell, CA (US);
Masaaki Higashitani, Cupertino, CA (US);
SanDisk 3D LLC, Milpitas, CA (US);
Abstract
One embodiment of the invention provides a method of forming a plurality of contact holes, including forming a first feature and a second feature over an underlying material, forming sidewall spacers on the first and second features, removing the first and second features without removing the sidewall spacers, forming a cover mask at least partially exposing the sidewall spacers, and etching the underlying material using the cover mask and the sidewall spacers as a mask to form the plurality of contact holes.