The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Oct. 29, 2009
Masaya Watanabe, Yamanashi, JP;
Sakae Kobayashi, Osaka, JP;
Akira Kabeshita, Yamanashi, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A substrate cleaning apparatus for cleaning a front-side clean target surfacea and a back-side clean target surfaceb of a edge portion of a substrateby wiping surfacesa,b of a cleaning tape. The substrate cleaning apparatus includes a presser membera for pressing the cleaning tapeagainst the clean target surfacea, a presser memberb for pressing the cleaning tapeagainst the clean target surfaceb, a tape path passing through between the presser membera and the clean target surfacea and between the presser memberb and the clean target surfaceb, a moving device for moving the cleaning tapeand the substraterelative to each other in a longitudinal direction of the edge portion.