The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Jan. 14, 2009
Chu-chen Fu, San Ramon, CA (US);
Tanmay Kumar, Pleasanton, CA (US);
Er-xuan Ping, Fremont, CA (US);
Huiwan Xu, Sunnyvale, CA (US);
Chu-Chen Fu, San Ramon, CA (US);
Tanmay Kumar, Pleasanton, CA (US);
Er-Xuan Ping, Fremont, CA (US);
Huiwan Xu, Sunnyvale, CA (US);
SanDisk 3D LLC, Milpitas, CA (US);
Abstract
A nonvolatile memory cell includes a storage element, the storage element comprising a carbon material, a steering element located in series with the storage element, and a metal silicide layer located adjacent to the carbon material. A method of making a device includes forming a metal silicide over a silicon layer, forming a carbon layer over the metal silicide layer, forming a barrier layer over the carbon layer, and patterning the carbon layer, the metal silicide layer, and the silicon layer to form an array of pillars.