The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Feb. 07, 2008
Applicants:
Samuel Ngai, San Francisco, CA (US);
Ady Levy, Sunnyvale, CA (US);
Inventors:
Samuel Ngai, San Francisco, CA (US);
Ady Levy, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Corporation, San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and systems for determining the quality of a substrate are disclosed. One or more substrates may be examined to determine whether bending is present at the edge of a substrate. The substrate may be accepted if it is determined that bending is not present at the edge of the substrate. The substrate may be rejected if it is determined that bending is present at the edge of the substrate.