The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2011

Filed:

Apr. 30, 2009
Applicants:

Maud Vinet, Rives, FR;

Thierry Poiroux, Voreppe, FR;

Bernard Previtali, Grenoble, FR;

Inventors:

Maud Vinet, Rives, FR;

Thierry Poiroux, Voreppe, FR;

Bernard Previtali, Grenoble, FR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8232 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method including: making a structure on a substrate, said structure comprising at least a portion of a semiconductor material forming a channel of a field effect transistor, a gate located on the channel; forming at least one dielectric portion completely covering said structure and zones of the substrate corresponding to locations of a source and a drain of the field effect transistor; making two holes in the dielectric portion on each side of said structure, such that the locations of the source and the drain form bottom walls of the two holes and sides of the channel are exposed; depositing a first metallic layer on at least the bottom walls of the two holes, at least covering said sides of the channel; and depositing a second metallic layer on the first metallic layer-to form the source and the drain of the field effect transistor.


Find Patent Forward Citations

Loading…