The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Mar. 24, 2008
Katsuaki Aoki, Kanagawa-ken, JP;
Naoya Hayamizu, Kanagawa-ken, JP;
Kei Hattori, Mie-ken, JP;
Yukihiro Oka, Mie-ken, JP;
Hidemi Kanetaka, Mie-ken, JP;
Makoto Hasegawa, Kanagawa-ken, JP;
Katsuaki Aoki, Kanagawa-ken, JP;
Naoya Hayamizu, Kanagawa-ken, JP;
Kei Hattori, Mie-ken, JP;
Yukihiro Oka, Mie-ken, JP;
Hidemi Kanetaka, Mie-ken, JP;
Makoto Hasegawa, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A surface treatment method includes: removing a fluorocarbon-containing reaction product from a surface of a workpiece by oxygen gas plasma processing. The workpiece includes a plurality of layers. The fluorocarbon-containing reaction product is deposited by successively etching the layers of the workpiece. The method further includes after removing the reaction product, removing an oxide-containing reaction product from the surface of the workpiece using hydrogen fluoride gas.