The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Jun. 05, 2009
Jin-liang Chen, Hsinchu, TW;
Liang-chia Chen, Taipei County, TW;
Huang-chi Huang, Hsinchu, TW;
Chun-tai Lien, Taipei County, TW;
Yong-tong Zou, Taoyuan County, TW;
Huang-wen Lai, Taipei County, TW;
Jin-Liang Chen, Hsinchu, TW;
Liang-Chia Chen, Taipei County, TW;
Huang-Chi Huang, Hsinchu, TW;
Chun-Tai Lien, Taipei County, TW;
Yong-Tong Zou, Taoyuan County, TW;
Huang-Wen Lai, Taipei County, TW;
Industrial Technology Research Institute, Hsin-Chu, TW;
National Taipei University of Technology, Taipei, TW;
Abstract
A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface.