The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Jun. 30, 2005
Robert Rafilevitch Gayazov, Troitsk, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Evgenii Dmitreevitch Korob, Troitsk, RU;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Yurii Victorovitch Sidelnikov, Troitsk, RU;
Robert Rafilevitch Gayazov, Troitsk, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Evgenii Dmitreevitch Korob, Troitsk, RU;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Yurii Victorovitch Sidelnikov, Troitsk, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A foil trap is located in a path of a radiation beam. The foil trap includes an array of conductive strips. A voltage application circuit is coupled to the strips to apply voltage differences between pairs of adjacent ones of the strips. The voltage application circuit includes a current limiting circuit arranged to limit currents to the strips to values below a threshold value above which self-sustained arc discharge may arise in the foil trap.