The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
May. 23, 2008
Applicants:
Michael White, Oswego, IL (US);
Jeffrey Gilliland, Montgomery, IL (US);
Lamon Jones, Aurora, IL (US);
Alicia Walters, Naperville, IL (US);
Inventors:
Michael White, Oswego, IL (US);
Jeffrey Gilliland, Montgomery, IL (US);
Lamon Jones, Aurora, IL (US);
Alicia Walters, Naperville, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
C09K 3/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides a chemical-mechanical polishing composition comprising wet-process silica, a stabilizer compound, a potassium salt, a secondary amine compound, and water. The invention further provides a method of polishing a substrate with the polishing composition.