The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Feb. 10, 2005
Takafumi Matsumoto, Kanagawa, JP;
Shun Mikami, Kanagawa, JP;
Kouichi Hanzawa, Kanagawa, JP;
Mineharu Moriya, Kanagawa, JP;
Hideyuki Odagi, Kanagawa, JP;
Tetsuya Shimada, Kanagawa, JP;
Masashi Kubo, Kanagawa, JP;
Susumu Ikeda, Kanagawa, JP;
Takafumi Matsumoto, Kanagawa, JP;
Shun Mikami, Kanagawa, JP;
Kouichi Hanzawa, Kanagawa, JP;
Mineharu Moriya, Kanagawa, JP;
Hideyuki Odagi, Kanagawa, JP;
Tetsuya Shimada, Kanagawa, JP;
Masashi Kubo, Kanagawa, JP;
Susumu Ikeda, Kanagawa, JP;
ULVAC, Inc., Kanagawa, JP;
Abstract
A thin film forming apparatus such that a substrate can be easily fixed/removed to/from the outer circumferential surface of a drum type substrate holder through a simple arrangement. The drum type substrate holder () is supported in a horizontal posture rotatably about a horizontal rotational shaft in a film deposition chamber A jig () holding a substrate () fixedly is transferred by an arm horizontally onto the outer circumferential surface of the drum type substrate holder (), and an end part () of the substrate fixing jig () can be secured by a securing device () provided at the corner part () of the outer circumferential surface of the drum type substrate holder ().