The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Mar. 22, 2007
Paul Antoon Cyriel Desmedt, Eindhoven, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Minne Cuperus, Veldhoven, NL;
Paul Antoon Cyriel Desmedt, Eindhoven, NL;
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Minne Cuperus, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A device manufacturing method comprising applying patterns to a plurality of arrays of individually controllable elements, such that they modulate a beam of radiation, and projecting the modulated beam of radiation onto a substrate. The patterns applied to the arrays of individually controllable elements are arranged such that pre-determined amounts of background radiation are included in the modulated beam of radiation. The pre-determined amounts of background radiation being different for different locations on the arrays.