The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Sep. 30, 2008
Kazuyuki Ikenaga, Hachioji, JP;
Tsutomu Tetsuka, Kasumigaura, JP;
Muneo Furuse, Kudamatsu, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The invention provides a cleaning apparatus for removing particles attached to the fine roughness on the surface of an insulating body coated on the metal surface of a vacuum processing apparatus. The present cleaning apparatus comprises an adhesive sheethaving a base materialand an adhesive surface, a conductive sheetin contact with the base material, and a pressing memberfor pressing the conductive sheetonto the adhesive sheet, a voltage applying mechanismfor applying positive or negative voltage to the conductive sheet, and a pressing force controlling mechanismfor pressing the adhesive sheetonto the curved surfaceof the vacuum processing apparatus, wherein the pressing memberpresses the conductive sheetand the adhesive sheetby a pressing force controlled via the pressing force controlling mechanismin order to closely adhere the adhesive surfaceof the adhesive sheetto the curved surface of the insulating bodyso as to remove particles attached to the insulating body, and positive or negative voltage is applied to the conductive sheetto generate electrostatic attraction force so as to attract and remove particles attached to the insulating body