The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2011
Filed:
Oct. 12, 2004
Applicants:
Vincent Paneccasio, Madison, CT (US);
Xuan Lin, Northford, CT (US);
Paul Figura, Orange, CT (US);
Richard Hurtubise, Clinton, CT (US);
Inventors:
Vincent Paneccasio, Madison, CT (US);
Xuan Lin, Northford, CT (US);
Paul Figura, Orange, CT (US);
Richard Hurtubise, Clinton, CT (US);
Assignee:
Enthone Inc., West Haven, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 5/02 (2006.01); C25D 3/38 (2006.01); H01L 21/288 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and composition for electroplating Cu onto a substrate in the manufacture of a microelectronic device involving and electrolytic solution containing a source of Cu ions and a substituted pyridyl polymer compound for leveling.