The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Dec. 15, 2009
Vahan Senekerimyan, San Diego, CA (US);
Nam-hyong Kim, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Vahan Senekerimyan, San Diego, CA (US);
Nam-Hyong Kim, San Diego, CA (US);
Robert A. Bergstedt, Carlsbad, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; a beam delivery system configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location; and a metrology system. The beam delivery system includes converging lens configured and arranged to focus the amplified light beam at the target location. The metrology system includes a light collection system configured to collect a portion of the amplified light beam reflected from the converging lens and a portion of a guide laser beam reflected from the converging lens. The light collection system includes a dichroic optical device configured to optically separate the portions.